Standardization of Excitation Efficiency in Near-field Scanning Optical Microscopy

Near-field scanning optical microscope (NSOM or SNOM) is a form of scanning probe microscope (SPM), which is used to observe the optical properties of a sample surface with a nanometer-scale spatial resolution. Since the near-field light strongly interacts with the sample surface, or with nanometer-scale objects on the substrate’s surface, NSOM is advantageous to excite only the vicinity of a sample surface. From the view point of surface chemical analysis, a discussion about the light energy concentration within a nanometer-scale region, and an estimation of its efficiency are indispensable for accurate measurements of the optical properties in a nanometer-scale region. In this paper, we describe the concept, the cautions and the general guidelines of a method to measure the excitation efficiency of aperture-type NSOM instruments.