Vertically coupled Si-based ring resonators for sensing applications
Group IV Photonics（2010）
摘要
We report the design of a vertically coupled silicon-based ring resonator for sensing applications. Such devices can be realized with relaxed fabrication tolerances, and without the need for e-beam lithography.
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关键词
integrated optics,microcavities,micromechanical resonators,microsensors,optical design techniques,optical fabrication,optical resonators,optical sensors,si,fabrication tolerances,ring resonators,sensing applications,vertically coupled silicon,ring resonator,sensors,silicon photonics
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