Properties of shunt-protected tunneling devices for the Electron Counting Capacitance Standard (ECCS) experiment at PTB

Precision Electromagnetic Measurements(2010)

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摘要
We report on the progress in the Electron-Counting-Capacitance-Standard (ECCS) experiment. In particular, we address electrostatic breakdown in metallic single-electron tunneling (SET) structures fabricated on high-quality insulating substrates, An approach was developed via on-chip silicon shunts protecting the high-ohmic nanoscale tunnel junctions against damage.
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capacitance,counting circuits,electric breakdown,single electron devices,substrates,tunnelling,eccs experiment,ptb,electron counting capacitance standard experiment,electrostatic breakdown,high-ohmic nanoscale tunnel junctions,high-quality insulating substrates,metallic set structures,metallic single electron tunneling structures,on-chip silicon shunts,shunt protected tunneling devices properties,voltage,tunneling,circuits,switches,temperature,electrons,chip,fabrication,system on a chip
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