Multi nozzle electrohydrodynamic inkjet printing head by batch fabrication

Kyo Il Lee,B Lim,Haehyeog Lee,S H Kim,C S Lee, J W Cho, S Chung,Y Hong

Micro Electro Mechanical Systems（2013）

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摘要

We report a multi nozzle electrohydrodynamic (EHD) printing head by using batch fabrication for the first time. Inks can be ejected from a glass nozzle by applied large electric field. Tiny nozzles with a outer diameter of 100 microns are fabricated by sand blasting on a glass wafer. A stable continuous jetting with a commercial carbon black ink was observed. Continuous lines with a width of 30 microns on a silicon wafer were printed simultaneously with a DC bias voltage of 1.7 kV at the stage speed of 500 mm/s. Separated dot patterns with a diameter of 20 microns were printed with various jetting frequency up to 10 kHz on a super-hydropobic teflon coated silicon wafer. Also continuous line width can be reduced to 20 microns on a hydrophobic surface.

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关键词

coatings,electrohydrodynamics,elemental semiconductors,glass,hydrophobicity,ink jet printing,jets,nozzles,silicon,dc bias voltage,ehd,si,batch fabrication,carbon black ink,continuous line width,electric field,glass nozzle,glass wafer,hydrophobic surface,jetting,multinozzle electrohydrodynamic inkjet printing head,sand blasting,separated dot pattern,size 100 micron,size 20 micron,size 30 micron,superhydropobic teflon coated silicon wafer,velocity 500 mm/s,voltage 1.7 kv

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