Zno:In thin solid films deposited by chemical spray. Effect of deposition temperature on the electrical, optical, structural and morphological properties

H Gomez,J L Gonzalezvidal,Leonardo Castellanos,Amir Maldonado,M De La L Olvera

Toluca（2009）

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摘要

The effect of deposition temperature on the electrical, optical, structural, and morphological properties of indium doped zinc oxide thin films, ZnO:In, deposited by the chemical spray technique have been studied in this work. The starting solution was prepared using zinc pentanedionate and indium chloride as Zn and In precursors, respectively. Ethyl alcohol was utilized as solvent. The films were deposited at a temperature interval between 450 and 525Â°C. The X-ray diffraction patterns show that the films are polycrystalline, having a preferential orientation along the direction. The scanning electron micrographs, SEM, clearly show the existence of a textured surface. The lowest electrical resistivity obtained was around 3Ã10-3 Â¿cm, and the optical transmittance in the visible region was higher than 75%.

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关键词

ii-vi semiconductors,x-ray diffraction,electrical resistivity,indium,pyrolysis,scanning electron microscopy,semiconductor growth,semiconductor thin films,spray coating techniques,visible spectra,wide band gap semiconductors,zinc compounds,zno:in,chemical spray,deposition temperature,electrical property,ethyl alcohol,indium chloride,morphological property,optical property,scanning electron micrographs,spray pyrolysis,structural property,temperature 450 c to 525 c,thin solid films deposition,zinc pentanedionate,zno,thin films,transparent conductor,thin film,x ray diffraction,zinc,electrical resistance,scanning electron micrograph,zinc oxide

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