32x32 Strictly Non-Blocking Si-Wire Optical Switch On Ultra-Small Die Of 11x25 Mm(2)

Ken Tanizawa,Keijiro Suzuki,Munehiro Toyama,Minoru Ohtsuka,Nobuyuki Yokoyama,Kazuyuki Matsumaro,Miyoshi Seki,Keiji Koshino, Toshio Sugaya,Satoshi Suda,Guangwei Cong,Toshio Kimura,Kazuhiro Ikeda,Shu Namiki,Hitoshi Kawashima

Optical Fiber Communications Conference and Exhibition（2015）

引用 33|浏览5

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摘要

We demonstrate an ultra-compact 32x32 path-independent-insertion-loss optical switch that integrates 1024 thermooptic MZ switches on SOI platform using ArF immersion lithography. On-chip loss of 19.7 dB and estimated crosstalk of-20 dB are achieved.

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关键词

optical waveguides,silicon,crosstalk,silicon on insulator,optical switches,system on chip,lithography

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