Modeling and simulation of 2 MHz external antenna for RF driven H− ion source

Ghodke, D.V.,Gunele, N.K.,Bhongade, S., Vadjikar, R.M.

Applied Electromagnetics Conference（2013）

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摘要

The modeling and simulation of externalantenna is important for the study of RF driven hydrogen plasma sources. The external antenna will be externally wrapped around plasma chamber. RF pulsed power feeding at 2 MHz frequency to antenna for plasma generation (ionisation) and heat up through inductive coupling. This antenna has been modeled and simulated with Opera-3D simulation platform using TOSCA module. This simulation will help to study the magnetic field behaviour and determination of electrical parameters of antenna.The analysis has been carried out by considering current of 400 Amp in antenna, the results are reported in the paper.

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关键词

antenna feeds,antenna radiation patterns,antennas in plasma,plasma radiofrequency heating,plasma simulation,plasma sources,plasma transport processes,Opera-3D simulation platform,RF driven H- ion source,RF driven hydrogen plasma source,RF pulsed power feeding,TOSCA module,current 400 A,electrical parameter determination,external antenna simulation,frequency 2 MHz,inductive coupling,plasma chamber,plasma generation,H− ion source,Inductivelly Coupled Plasma,Opera-3D,RF Antenna,inductive coupling

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