Thin-Film Coatings For Improved Thermal Performances Of Gan-Based Hemts

R. Aubry,N. Michel,J. C. Jacquet,L. Baczkowski, O. Patard,E. Chartier, D. Lancereau, S. Bohbot,M. A. Di Forte Poisson, M. Oualli,S. Piotrowicz, S. L. Delage,A. Djouadi, Y. Scudeller, K. Ait-Aissa, J. Calus, E. Kohn, M. Gaillard, C. Leborgne,N. Semmar

Lester Eastman Conference High Performance Devices（2014）

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摘要

Thin-film coatings for improved performances of GaN-based HEMTs are investigated. AlN coatings are used either as primary or secondary passivation to reduce the thermal resistance of the transistors.

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关键词

Thermal Management,GaN,HEMTs,AlN coatings

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