A novel approach to RF MEMS device- and system-level simulation based on MEMS+ and Matlab-Simulink
Design, Test, Integration and Packaging of MEMS/MOEMS（2013）
摘要
The aim of this work is to model a novel tuneable RF capacitor based on a gyroscope-like complex geometry using a new design platform based on component library MEMS+. This modelling approach allows detailed and accurate device simulation as well as rapid system-level simulation through an automatic transfer into general system software, namely Matlab/Simulink.
更多查看译文
关键词
capacitors,gyroscopes,micromechanical devices,matlab-simulink,rf mems device,automatic transfer,component library mems+,general system software,gyroscope-like complex geometry,system-level simulation,tuneable rf capacitor,mems modelling,rf mems,micro-fabrication,system level simulation,tunable capacitor,finite element analysis,mathematical model,radio frequency
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要