3D Silicon Sensors - Large Area Production, QA and Development for the CERN ATLAS Experiment Pixel Sensor Upgrade
2012 IEEE Nuclear Science Symposium and Medical Imaging Conference Record (NSS/MIC)（2012）
Key words
silicon radiation detectors,transition radiation detectors,3D ATLAS Collaboration,3D fabrication,3D sensor production,3D silicon sensors,ATLAS experiment,ATLAS pixel Insertable B-Layer,CERN ATLAS Experiment,LHC Upgrade,detector proximity,large area production,narrow deep vertical openings,p-i-n junctions,perimeter dead area,pixel sensor upgrade,plasma micromachining,proton beams,radiation hard technologies,sensor edge,silicon substrate
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