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Phase Change Memories Challenges: A Material and Process Perspective

S. Maitrejean,G. Ghezzi,E. Gourvest,G. Betti Beneventi,A. Fantini,N. Pashkov,G. Navarro,A. Roule,F. Fillot,P. Noe,S. Lhostis,O. Cueto,C. Jahan,J. F. Nodin,A. Persico,M. Armand,L. Dussault, C. Valle,Ph Michallon,R. Morel,A. Brenac,M. Audier,J. Y. Raty,F. Hippert,L. Perniola,V. Sousa,B. de Salvo

2012 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE (IITC)（2012）

Cited 4|Views0
Key words
phase change materials,phase change memories,ALD,CVD,PCM,advanced integration nodes,phase change material composition,phase change memories,phase transformation
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