Design and calibration of a microfabricated 6-axis force-torque sensor for microrobotic applications
Kobe（2009）
摘要
This work describes the design of a capacitive multi-axis force-torque sensor for the monitoring of forces in the sub-milli-Newton and sub-micro-Newtonmeter range. This force range makes it a valuable tool for microrobotic applications. The sensor is experimentally investigated and calibrated. This is the first microfabricated 6-axis force-torque sensor that has been successfully developed.
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关键词
calibration,force sensors,microfabrication,micromanipulators,torque control,MEMS,calibration,capacitive multiaxis force-torque sensor,microfabricated 6-axis force-torque sensor design,micromanipulation,microrobotic application
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