NEMS-based optical phase modulator fabricated on Silicon-On-Insulator

Karel Van Acoleyen,Joris Roels,Tom Claes,Dries Van Thourhout,Roel Baets

Group IV Photonics（2011）

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摘要

We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9μm long slot waveguide an optical phase change of 60° was observed.

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关键词

electro-optical modulation,nanoelectromechanical devices,silicon-on-insulator,nems-based optical phase modulator,size 9 mum,under-etched slot waveguide,voltage 15 v,optical waveguides,silicon on insulator,photonics,optical waveguide,optical sensor,stimulated emission,phase modulation

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