A current density analysis tool to identify BEOL fails under ESD stress

Souvick Mitra,Nicholas Palmer,Robert J Gauthier,Mujahid Muhammad,Ralph Halbach,C Seguin

Electrical Overstress/Electrostatic Discharge Symposium（2011）

引用 28|浏览3

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摘要

BEOL Metal structures were characterized for defining ESD current handling capability, once a failure criterion is established; a current density analysis tool is used to simulate the results. The current density tool can identify metal fails for simple structures and needs update for complex current path. The tool is important for a designer to verify and update any weak path that may degrade the design.

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关键词

current density,electrostatic discharge,failure analysis,beol metal structures,esd stress,complex current path,current density analysis tool,failure criterion,metals,shape,resistance

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