Modeling and characterization of Mach-Zehnder silicon electro-optical modulators

G R Zhou,Michael W Geis,S J Spector,Fuwan Gan,Matthew E Grein,R T Schulein, J U Yoon,D M Lennon,Erich P Ippen,T M Lyszczarz,Franz X Kartner

San Jose, CA（2008）

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摘要

We present a comprehensive study of silicon Mach-Zehnder modulators based on carrier injection. Detailed comparisons between simulation results and measurements are made and excellent agreement is obtained for DC and AC characteristics.

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关键词

electro-optical modulation,elemental semiconductors,silicon,ac characteristics,dc characteristics,mach-zehnder modulators,carrier injection,electrooptical modulators,silicon modulators,(130.3120) integrated optics devices,(230.2090) electro-optical devices,(250.5300) photonic integrated circuits,(250.7360) waveguide modulators,mach zehnder modulator,mach zehnder,photonic integrated circuit,optical interferometry,optical waveguides,voltage

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