Ozone sensing properties of NbO2 thin films for health and safety applications

Arshak, Khalil,Hickey, G.,Harris, J.,Forde, E.

Atlanta, GA（2008）

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摘要

This work investigates the ozone sensing properties of NbO2 thin films operating at room temperature. NbO2 thin films have been deposited on alumina and glass substrates provide with Cu interdigitated electrodes by the Vacuum Thermal Evaporation technique. The optical properties of NbO2 thin films were explored using CARY IE UV-Visible Spectrophotometer. The values of the optical band gap EOPT are estimated in view of the Mott and Davis' theory. The electrical response has been measured by exposing the sensing layers to ozone (ppb). NbO2 films fabricated by this method have shown good sensitivity to environmentally relevant ozone concentrations.

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关键词

gas sensors,health and safety,niobium compounds,oxygen,vacuum deposition,Al2O3,Mott-Davis theory,NbO2,UV-visible spectrophotometer,copper interdigitated electrodes,health application,optical band gap,ozone sensing property,safety application,thin films,vacuum thermal evaporation technique,Gas Sensor,Niobium Oxide,Ozone,Thin Film,Vacuum Thermal Evaporation

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