Fabrication of Stainless Steel Mold using Electro Chemical Fabrication (ECF) method for Microfluidic Biochip

Min-Soo Cho,Hyun-Woo Lim,Lee, C.S.,Byung-Ki Cho

Kyoto（2007）

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摘要

In this paper, SUS mold was fabricated using both ECF method and FeCl3 wet etching. The ECF mold showed the surface roughness values much better than that for FeCl3 etched mold. Therefore, SUS mold was successfully fabricated for the first time in micro-scale and multi-step patterns. Plastic replica was fabricated successfully using the metal mold.

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关键词

bioMEMS,electrochemistry,etching,injection moulding,microfluidics,stainless steel,surface roughness,ECF,FeCl3 wet etching,FeCrCJk,electrochemical fabrication method,injection molding,microfluidic biochip,microscale patterns,plastic replica,stainless steel mold,surface roughness,

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