Design and Microfabrication of Innovated FBAW Filters Based on an OOK Receiver Using 0.18um CMOS Technology

Chiming Fang,Peiyen Chen,Yungchung Chin,Yutso Lin,Xuanyu Wang,Sheyshi Lu,Peizen Chang

Bangkok（2007）

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摘要

This paper presents the design and microfabrication of innovated film bulk acoustic wave (FBAW) filters based on a low voltage low power on-off keying (OOK) miniaturized monolithic receiver using 0.18mum CMOS technology. FBAW filters have the potential to enable the fabrication of high quality filters integrated with RF CMOS circuitry on a chip. To match the specifications of OOK receiver, an 866MHz 167ohms FBAW filter would be implemented in this research to demonstrate the process compatibility between the FBAW filter and the 0.18mum CMOS standard IC. This integrated device could be used as part of a wireless local area sensor network, and helpful to integrate RF system into a single chip.

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关键词

acoustic receivers,acoustic resonator filters,amplitude shift keying,bulk acoustic wave devices,low-power electronics,0.18 micron,cmos technology,fbaw filters,ook receiver,film bulk acoustic wave filters,film bulk acoustic wave resonator,low voltage low power on-off keying miniaturized monolithic receiver,systerm on a chip,cmos mems,film bulk acoustic wave filter (fbaw filter),film bulk acoustic wave resonator (fbar),integration,rf filter,systerm on a chip (soc),sensor network,low power electronics,chip,on off keying,low voltage

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