Voltage-dependent voltage-acceleration of oxide breakdown for ultra-thin oxides

San Francisco, CA, USA, 2000, Pages 541-544.

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Abstract:

We report the voltage-dependence of voltage acceleration for ultra-thin oxides from 2.2 V to 5 V over a range of T/sub ox/ values from 1.7 nm to 5.0 nm. This unique behavior manifest itself as a power-law voltage-dependence for time-to-breakdown (T/sub BD/) over a variety of experimental observations. Using the concept of energy-to-breakd...More

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