MEMS-based diagnostic microsystems

D L Polla,Peter A Krulevitch,Andrew Wang,Graham Smith, Jaime Diaz,Susan C Mantell, Jun Zhou,Shayne M Zurn,Yoonkey Nam, Liangqi Cao, J V Hamilton, C R Fuller,Peter R C Gascoyne

Lyon（2000）

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摘要

Three new approaches to diagnostic microsystems based on MEMS technologies are described with the goal of realizing affordable instruments critical to the diagnosis of disease or exposure to pathogens. These are: (1) molecular recognition biosensors based on resonant cantilever microbeams; (2) miniature mass spectrometers; and (3) a multi-frequency particle impedance characterization microsystem

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关键词

biomedical equipment,biosensors,mass spectrometers,micromechanical devices,patient diagnosis,mems-based diagnostic microsystems,affordable instruments,disease diagnosis,miniature mass spectrometers,molecular recognition biosensors,multifrequency particle impedance characterization microsystem,pathogens exposure,resonant cantilever microbeams,cancer,resonant frequency,mass spectrometer,molecular recognition,resonance,mass spectroscopy

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