Robust controller design for RTP system using structured uncertainty approach

Sang Kyung Lee,Jong Hae Kim,Do Chang Oh,Hong Bae Park

Morioka（1999）

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摘要

In this paper, we propose an robust controller design of rapid thermal processing (RTP) system using the structured uncertainty approach. Using the weighted mixed sensitivity function, we solve the robust stability problem against disturbance and temperature variation, and design a μ controller using the curve fitting method against structured uncertainty. Finally, the simulation results are proposed to show the validity of the proposed method

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关键词

control system synthesis,curve fitting,integrated circuit manufacture,process control,rapid thermal processing,robust control,sensitivity analysis,temperature control,μ controller,stability,structured uncertainty,weighted mixed sensitivity

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