Wafer Level Integration of a 24 GHz and 34 GHz Differential SiGe-MMIC Oscillator with a Loop Antenna on a BCB Membrane
Microwave Symposium Digest, 2003 IEEE MTT-S International（2003）
Key words
Ge-Si alloys,MIMIC,MMIC oscillators,integrated circuit packaging,loop antennas,membranes,microwave antennas,millimetre wave antennas,millimetre wave oscillators,semiconductor materials,silicon,24 GHz,34 GHz,BCB membrane,Si,Si substrate,SiGe,benzo cyclo butene membrane,buffer amplifier,differential SiGe MMIC oscillator,loop antenna,phase noise,wafer level integration
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