Reliability of segmented edge seal ring for RF devices

Jeffrey P Gambino,Richard S Graf,J C Malinowski,A Cote,W Guthrie,Kimball M Watson, P F Chapman, K K Sims,Mark D Levy,Toyohiro Aoki, Georgia Mason,Mark D Jaffe

Interconnect Technology Conference / Advanced Metallization Conference（2014）

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摘要

RF devices are sensitive to noise coupling between devices. One source of coupling is the edge seal ring. We propose using a segmented guard ring to reduce coupling between devices. We demonstrate that the segmented guard ring is reliable for a 0.18 μm RF technology.

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关键词

electromagnetic interference,integrated circuit noise,integrated circuit packaging,integrated circuit reliability,seals (stoppers),rf device,noise coupling,segmented edge seal ring reliability,segmented guard ring,size 0.18 mum,contamination,stress,mobile communication,radio frequency,logic gates

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