Efficient thermally tunable linear photonic crystal cavities in a zero-change microelectronics SOI CMOS process
Lasers and Electro-Optics(2014)
摘要
We demonstrate directly-doped Si tunable linear photonic crystal microcavities. Also the first tunable photonic crystals realized in an advanced (45nm) SOI CMOS microelectronics process with no in-foundry process changes, they show 0.63nm/mW tuning efficiency.
更多查看译文
关键词
cmos integrated circuits,elemental semiconductors,integrated optoelectronics,micro-optics,microcavities,photonic crystals,silicon,silicon-on-insulator,soi cmos microelectronics process,si,directly-doped tunable linear photonic crystal microcavity,size 45 nm,thermally tunable linear photonic crystal cavity,tuning efficiency,zero-change microelectronics soi cmos process
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络