Reversible Nano-Lithography Between Materials

Nano/Micro Engineered and Molecular Systems(2014)

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摘要
The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro-or nano-scale sensors and actuators.
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关键词
nanolithography,biochips,biological devices,biomimetic devices,display devices,energy devices,energy harvesters,fuel cells,hard polymer,metal,nanostructures,optical devices,photonic components,physical devices,reversible nanolithography,secondary batteries,soft polymer,solar cells,polymers,silicon
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