Athermal Silicon Slot Waveguide With an Ormocomp Polymer Overlayer

Fegadolli, W.S.,Lira, H.L.R.,Hiltunen, M.,Karioja, P.

Photonics Technology Letters, IEEE （2014）

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摘要

We have demonstrated a proof-of-concept for an athermal silicon slot waveguide using Ormocomp as a top cladding. Preliminarily theoretical and experimental results show that the slot waveguide geometry can completely cancel out its thermo-optical coefficient, by tailoring the optical mode overlap with silicon, silicon dioxide, and Ormocomp.

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关键词

claddings,integrated optics,optical fabrication,optical polymers,optical waveguides,silicon,silicon compounds,thermo-optical devices,thermo-optical effects,Ormocomp polymer overlayer,Si,SiO2,athermal silicon slot waveguide,optical mode,proof-of-concept,slot waveguide geometry,thermo-optical coefficient,top cladding,Silicon photonics,athermal waveguides,integrated optics

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