Fabrication of silicon-core waveguide on bulk Si substrate with mold-assisted method and KrF Excimer laser reformation

Sigma Chen,Shihche Hung, Shihjie Lin,Huayi Shueh,Songting Yang,Shengkai Chang,Yuzhong Lin,Kuanyu Chen,Chingfuh Lin

Nanotechnology（2014）

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摘要

The work is to fabricate a CMOS-compatible low-loss Si waveguide structures by KrF Excimer laser reformation system. It also solves the on-chip integration issues between electronics and photonics, as well as reduces the propagation loss for on-chip optical interconnect applications. By applying the mold-assisted method, the propagation loss can be reduced to 2±0.2dB/cm.

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关键词

elemental semiconductors,excimer lasers,krypton compounds,laser materials processing,moulding,optical fabrication,optical interconnections,optical losses,optical waveguides,silicon,cmos-compatible low-loss si waveguide structure fabrication,krf,si,bulk si substrate,excimer laser reformation,mold-assisted method,on-chip integration,on-chip optical interconnect,propagation loss,silicon-core waveguide

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