Development and progress in thin film Si photovoltaic technologies
Photovoltaic Specialist Conference（2014）
摘要
Photovoltaic Power Generation Technology Research Association (PVTEC) has organized the consortium of one national research institute and five private companies, which has been supported technically by three universities. It has developed thin film Si PV technologies of improving conversion efficiency and developing a high-productivity Si deposition apparatus. For improving the conversion efficiency, the stabilized efficiency of 10.1% for an a-Si:H cell, 11.0% for a μc-Si cell, and 12.2% with light induced degradation ratio of less than 3% have been achieved, respectively. We have also successfully developed a plasma-enhanced chemical vapor deposition (PECVD) machine, which can deposit high-quality μc-Si films uniformly on a large-scale substrate with high deposition-rate by using very high frequency (VHF) plasma.
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关键词
elemental semiconductors,photovoltaic power systems,plasma cvd,silicon,solar cells,thin film devices,pecvd machine,pvtec,photovoltaic power generation technology research association,si,vhf plasma,conversion efficiency,deposition rate,efficiency 10.1 percent,efficiency 11.0 percent,efficiency 12.2 percent,high-productivity silicon deposition apparatus,high-quality microcrystalline silicon films,large-scale substrate,light induced degradation ratio,national research institute,plasma-enhanced chemical vapor deposition machine,stabilized efficiency,thin film silicon pv technologies,thin film silicon photovoltaic technology,very-high-frequency plasma,photovoltaic cell,plasma-enhanced chemical vapor deposition,thin film silicon,plasma enhanced chemical vapor deposition,indium tin oxide
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