Modeling of Low Temperature Plasma for Surface and Airborne Decontamination

Plasma Science, IEEE Transactions  (2014)

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摘要
This paper aims to study and develop new plasmabased technology for the next generation of molecular decontamination systems. A capacitively coupled plasma is considered for cleaning using the plasma fluxes directed to the walls. The model used for this purpose is the PLASIMO fluid module applied to a simplified 2-D geometry with pure argon gas. The modeling results are validated by comparison with experimental results and observations. Images of the plasma in the reactor and images of the calculated species distribution are presented.
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argon,decontamination,plasma applications,2d geometry,ar,plasimo fluid module,airborne decontamination,argon gas,capacitively coupled plasma,low-temperature plasma,molecular decontamination systems,plasma flux,plasma-based technology,plasma cleaning,plasma modelling,plasma simulation,plasma-surface interaction,plasmas
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