Functional micro-nano structures for on-chip fourier transform spectrometers

Maurine Malak,Konstantins Jefimovs,I Philipoussis,Joab Di Francesco,Benedikt Guldimann,Toralf Scharf

Design, Test, Integration and Packaging of MEMS/MOEMS（2014）

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摘要

Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Pérot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact Fourier Transform optical spectrometer based on micro-nano structures, combining a polymer-based integrated optical circuit with movable external mirror for increased sampling and high precision.

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关键词

fabry-perot interferometers,fourier transform optics,fourier transform spectrometers,michelson interferometers,arrayed waveguide gratings,focal planes,integrated optics,micro-optics,mirrors,nanophotonics,optical polymers,spectral analysis,fpas,fabry-pérot interefrometer,michelson interferometer,array waveguide grating,focal plane array spectrometers,functional micro-nanostructures,movable external mirror,on-chip fourier transform spectrometers,optical microsystems,polymer-based integrated optical circuit,standing wave fourier transform spectrometer,epocore/epoclad polymer waveguide,fourier transform spectrometer,nano-antennas,nano-couplers,nanofield samplers,swifts,optical fibers,polymers,optical interferometry

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