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Spatial Resolution Evaluation of ZnO Scintillator As an In-situ Imaging Device in EUV Region

Tomoharu Nakazato,Tatsuhiro Hori,Toshihiko Shimizu,Kohei Yamanoi,Kohei Sakai,Kohei Takeda,Ryosuke Nishi,Yuki Minami,Marilou Cadatal-Raduban,Nobuhiko Sarukura,Hiroaki Nishimura,Hiroshi Azechi,Tsuguo Fukuda,Momoko Tanaka,Masaharu Nishikino,Tetsuya Kawachi

IEEE Transactions on Nuclear Science（2014）

引用 5|浏览3
关键词
Scintillators,wide-band-gap semiconductors,X-ray imaging
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