Complete Si-photonics device-library on 300mm wafers

D Fowler,C Baudot,J M Fedeli,B Caire,L Virot, A Leliepvre,Gilles Grand,A Myko,Delphine Marrismorini,S Messaoudene,A Souhaite,Scot S Olivier,Philippe Grosse,Guanghua Duan,B Ben Bakir,F Boeuf,Laurent Vivien,S Menezo

Optical Fiber Communications Conference and Exhibition（2014）

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摘要

We report performances of active and passive devices in a Silicon-Photonic library on a 300mm-CMOS-platform, showing highly uniform behavior of passive WDM devices, Mach-Zehnder modulators and germanium photo-detectors with state of the art performances.

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关键词

cmos integrated circuits,mach-zehnder interferometers,elemental semiconductors,germanium,integrated optoelectronics,optical modulation,photodetectors,silicon,wavelength division multiplexing,cmos platform,ge,mach-zehnder modulators,si,si-photonics device,active devices,passive wdm devices,photo-detectors,size 300 mm,wafers,insertion loss

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