Integration of silicon photonics in bulk CMOS

    VLSI Technology, 2014, Pages 1-2.

    Cited by: 17|Bibtex|Views12|Links
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    Keywords:
    cmos integrated circuitsge-si alloysepitaxial growthintegrated opticsisolation technologyMore(20+)

    Abstract:

    The first monolithic process flow integrating silicon photonics on operational bulk CMOS has been developed. Features include deep-trench isolation, polysilicon waveguides, grating couplers, filters, modulators, and detectors. Fully functional on-chip CMOS enables Tx/Rx operation while minimizing interconnect parasitics. With the addition...More

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