Integration of silicon photonics in bulk CMOS
VLSI Technology, 2014, Pages 1-2.
cmos integrated circuitsge-si alloysepitaxial growthintegrated opticsisolation technologyMore(20+)
The first monolithic process flow integrating silicon photonics on operational bulk CMOS has been developed. Features include deep-trench isolation, polysilicon waveguides, grating couplers, filters, modulators, and detectors. Fully functional on-chip CMOS enables Tx/Rx operation while minimizing interconnect parasitics. With the addition...More
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