Punch Through Stop Layer Optimization in Bulk FinFETs

Rui Li,Yunfei Liu,Keke Zhang,Chao Zhao,Huilong Zhu,Haizhou Yin

2014 12TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)（2014）

引用 14|浏览8

关键词

MOSFET,semiconductor device models,n-type FinFET,off-state leakage,punch through leakage,punch through stop layer optimization,size 22 nm,triangular fins

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