Optimization of design and microfabrication of metamaterial-based absorber for terahertz microbolometer

Oulachgar, H.,Paultre, J.-E.,Provencal, F.,D'Amato, D.

Infrared, Millimeter, and Terahertz waves（2014）

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摘要

The sensitivity of uncooled microbolometer detectors to terahertz radiation can be significantly improved by enhancing the platform absorption. This paper presents the various aspects of design and optimization of metamaterial based frequency selective terahertz absorber. It also briefly discusses the microfabrication of terahertz microbolometer focal plane array which was recently developed at INO.

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关键词

metamaterials,microfabrication,optimisation,frequency selective terahertz absorber,metamaterial based absorber,microbolometer detectors,microfabrication design optimisation,platform absorption,terahertz microbolometer,terahertz microbolometer focal plane array

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