Modeling of an electron beam generated Ar-N2 Plasma for plasma processing

G M Petrov,D R Boris,Tz B Petrova,E H Lock,R F Fernsler,S G Walton

ICOPS) held with 2014 IEEE International Conference High-Power Particle Beams（2014）

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摘要

A spatially averaged model of an electron beam generated plasma immersed in a constant magnetic field is developed to model the impact of small admixture of nitrogen to an argon background on the development of the electron energy distributions function. The model is based on numerical solution of the electron Boltzmann equation self consistently coupled to a set of rate balance equations for electrons, argon and nitrogen species. The electron energy distribution function, electron density and temperature are calculated as a function of the fraction of nitrogen in the gas and compared to experimentally measured data1.

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关键词

boltzmann equation,argon,mixtures,nitrogen,numerical analysis,plasma chemistry,plasma density,plasma simulation,plasma temperature,plasma-beam interactions,n2-ar,constant magnetic field,electron boltzmann equation,electron beam generated argon-nitrogen plasma,electron density,electron energy distribution function,electron temperature,nitrogen-argon admixture,numerical solution,plasma processing,rate balance equations,self consistent model,distribution functions,mathematical model,plasmas

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