Effect of electric field polarity on inter-poly dielectric during cell operation for the retention characteristics.

Microelectronics Reliability(2015)

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摘要
•Effect of applied electric field polarity on the electrical characteristics of IPD.•Impact of applied electric field polarity on leakage current of IPD.•Analysis between charges trapping and electric field polarity via leakage current.•Cell programming after erasing operation causes leakage current increase.
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关键词
Inter-poly dielectric (IPD),ONO,Leakage current,Bias polarity
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