NEMS variable optical attenuator (VOA) driven by optical force
Micro Electro Mechanical Systems（2015）
摘要
This paper reports a Nanoelectromechanical System (NEMS) Variable Optical Attenuator (VOA) driven by the optical gradient force. The VOA is realized via a waveguide based directional coupler. The gap in the directional coupler is controlled via an optical force driven actuator. The doubly-clamped silicon beam actuator is controlled by tuning the wavelength of control light. The signal light can be attenuated to 20% of original value in the experiment. The NEMS VOAs have the merits of small dimension, low power consumption and good capability for all optical integration, making it a good candidate for future applications in silicon photonics circuit and optical communication devices.
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关键词
elemental semiconductors,integrated optics,laser tuning,nanoelectromechanical devices,nanophotonics,optical attenuators,optical directional couplers,optical fabrication,optical waveguides,silicon,nems variable optical attenuator,si,voa,all optical integration,doubly-clamped silicon beam actuator,light attenuation,low power consumption,nanoelectromechanical system,optical communication devices,optical gradient force,silicon photonics circuit,waveguide-based directional coupler,wavelength tuning,optical fibers,actuators,nanoelectromechanical systems
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