27.6 A 0.7pF-to-10nF fully digital capacitance-to-digital converter using iterative delay-chain discharge

Capacitance sensors are widely used to measure various physical quantities, including position, pressure, and concentration of certain chemicals [1-6]. Integrating capacitive sensors into a small wireless sensor system is challenging due to their large power consumption relative to the total system power/energy budget, which can be as low as a few nW [4]. Typical capacitance-to-digital converters (CDCs) use charge sharing or charge transfer between capacitors to convert the sampled capacitance to voltage, which is then measured with an ADC [1-6]. This approach requires complex analog circuits, such as amplifiers and ADCs, increasing design complexity and often increasing power consumption. Moreover, the initial capacitance to voltage conversion essentially limits the input capacitance range because of output voltage saturation. This paper presents a fully digital CDC that is based on the observation that when a ring oscillator (RO) is powered from a charged capacitance, the number of RO cycles required to discharge the capacitance to a fixed voltage is naturally linear with the capacitance value. This observation enables a simple, fully digital conversion scheme that is inherently linear. As a result, the proposed CDC performs conversion across a very wide capacitance range from 0.7pF to over 10nF with <; 0.06% linearity error. The CDC senses 11.3pF input capacitance with 35.1 pJ conversion energy and 141fJ/c-s FoM.