Measurement of random surface parameters by angle-resolved in-plane light scattering with constant perpendicular wave vector

We report the experimental method of angle-resolved in-plane light scattering for random surface parameter extraction. In the measurement of the scattered intensity profile at a certain angle of incidence, the perpendicular component of wave vector remains constant, which is realized by controlling the movement of the detector along a specified circular arc segment. We use the central delta-peak and the half-width of the diffused intensity profiles and their variations to obtain the roughness w, the lateral correlation length xi and roughness exponent.. of the rough surface sample. The measurement copes strictly with the theoretical analysis, and the inherent problem in previous in-plane light scattering experiment is overcome so that the changes of the perpendicular component of wave vector affect the half width a diffused intensity profile and the measurement accuracy.