Growth of β-FeSi2 thin film on textured silicon substrate for solar cell application
Applied Surface Science(2011)
摘要
(2 0 2)/(2 2 0)-oriented epitaxial β-FeSi2 thin films were deposited on textured Si (1 0 0) substrate by magnetron sputtering. The influences of thickness and annealing temperature on the β-FeSi2 crystallization were studied to find the optimal condition. The results of surface morphology and optical property measurements showed that the inverted pyramid array in the surface of β-FeSi2 thin films could reduce the surface reflection of β-FeSi2. In dark condition, the β-FeSi2/textured-Si heterojunction showed diode property with rectifying ratio of 2.89 × 105 and built-in potential of 0.58 V. These results indicated the potential application of textured Si substrate in β-FeSi2 solar cells. © 2011 Elsevier B.V. All rights reserved.
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关键词
β-FeSi2,Textured silicon,Magnetron sputtering,Heterojunction
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