The Role of Si and Sb in the Si-Sb-Te Phase-change Material

Sb-rich Si-Sb-Te phase change materials with different Si contents were proposed and fabricated, and the role of Si and Sb in the Si-Sb-Te alloys was discussed. The resistance-temperature and retention properties of the Sb-rich Si-Sb-Te alloys were studied. Devices based on the Sb-rich Si-Sb-Te alloys were fabricated by a 0.18 μm CMOS technology and device properties were studied by pulsed mode resistance-voltage ( R-V ) measurements. Experimental results show that the crystallization temperature and data retention ability of the Sb-rich Si-Sb-Te alloys were obviously improved with increasing Si content, but the electrical properties degenerate if too much Si was added. Sb is helpful to promote the crystallization process, but excessive Sb decreases the thermal stability. So, in order to obtain practicable Sb-rich Si-Sb-Te phase change materials, suitable Si and Sb contents are required to balance the device performances between electrical switching property and thermal stability or data retention ability.