A high-resolution silicon-on-glass z axis gyroscope operating at atmospheric pressure

Haitao Ding,Xuesong Liu,Longtao Lin,Xiaozhu Chi,Jian Cui,Michael Kraft,Zhenchuan Yang,Guizhen Yan

IEEE Sensors Journal（2010）

引用 46|浏览6

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摘要

This paper describes a high-resolution silicon-on-glass z axis gyroscope operating at atmospheric pressure. The mechanical structure is designed in such a way that it exhibits low cross coupling between drive and sense mode of less than 0.5% simulated using finite-element method and 1.35% verified by experimental measurements. Due to a symmetrically designed structure, the specified bandwidth can ...

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关键词

Frequency measurement,Gyroscopes,Atmospheric measurements,Bandwidth,Fabrication,Atmospheric modeling,Finite element methods,Mechanical variables measurement,Silicon,Glass

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