Sensitive SWCNTs gas sensor fabricated on a flexible parylene-C substrate

Vacuum Electron Sources Conference and Nanocarbon(2010)

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摘要
In this paper, we present a flexible and robust SWCNTs based highly sensitive chemiresistor sensor for environmental monitoring applications. Parylene-C is utilized as the substrate in making our flexible sensors. Parylene-C is a light-weight, stress-free, transparent and inert film, is amenable to microfabrication, hence makes a suitable substrate for making flexible nanosensors.
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关键词
single walled carbon nanotube,nanosensors,flexible sensor,environmental monitoring,sensitive swcnt gas sensor,parylene-c substrate,microfabrication,carbon nanotubes,gas sensors,chemiresistor sensor,methanol
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