Design of hybrid integrated capacitance accelerometer

The operating principle of a capacitive acceleration sensor is analyzed in detail. Based on the principle, we design a capacitive acceleration sensor which can convert the inertia force for linear acceleration to the distortion of elasticity. The distortion is measured through a strain meter and a detection circuit. The schematic diagram of signal conditioning circuit is analyzed. The capacitive sensing element and signal conditioning circuit are realized by the thick film process technology, which is further fabricated and formed a capacitive acceleration measurement system. The system has advantages of mini-type and high integration. The fabrication process of the thick-film circuit is expatiated in detail. Experiment results show that the integrated acceleration sensor has good linearity and high sensibility.