Dynamic Scaling In Growth Of Zro2 Thin Films Prepared By Electronic Beam Evaporation

The growth front evolution Of ZrO2 thin Elms deposited by electronic beam evaporation has been studied with atomic force microscopy. The dynamic scaling characteristics are observed during the deposition process. After numerical correlation analysis, the roughness exponent alpha = 0.80 +/-0.005 and the growth exponent beta = 0.141 are all obtained. Based on these results, we suggest that the growth Of ZrO2 thin Elms can be described by the combination of the Edwards-Wilkinson equation, the Mullins diffusion equation and the shadowing effect.