REACE: A New Algorithm for Low Energy Ion Implantation Simulation.

A new method for the acceleration of MD (molecular dynamics) simulation of ion implantation into crystalline targets is presented, named REACE (Rare Event Algorithm with Cascade Effect). This method can speed up the MD simulation of ion implantation with cascade processes. As a result, the time required to perform a simulation with high precision and dose effect is drastically reduced. And many details producing statistical noise in the simulation are simulated in the REACE and help it to be more reasonable and reliable.