Effect of annealing on magnetic properties and structures of TbCo thin films

The magnetic properties and structures of sputtered and annealed TbCo thin films have been studied. The results show that the film will be changed from the amorphous to the polycrystalline, and oriented with (100) plane. The contents of Tb and Co for the film are not almost changed after vacuum annealing, and a change of the easy axis of the film from out-of-plane to in-plane is found.