Investigation on thermal stability of Ta2O5, TiO 2 and Al2O3 coatings for application at high temperature

Peng Shang,Shengming Xiong,Linghui Li,Dong Tian,Wanjun Ai

Applied Surface Science（2013）

引用 48|浏览2

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摘要

•TiO2, Ta2O5 films closing to the stoichiometric ratios were prepared by DIBS.•Characteristics of the Ta2O5 and TiO2 films were investigated.•Thermal stability of TiO2 films, as well as their possible damaged mechanicals involved was discussed.

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关键词

Thermal stability,TiO2/Ta2O5/Al2O3,Coating,Mismatch

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