Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods

Y. J. Guo,Jia Zhang,Chunyu Zhao,Jinyi Ma,Huafeng Pang,P. A. Hu,Frank Placido,D R Gibson,Xiaotao Zu,Haoyue Zu,Yong Qing Fu

Materials Research Bulletin（2013）

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摘要

•Love mode SAW devices based on ZnO/42° YX LiTaO3 were fabricated.•Characteristics of the devices were studied as a function of the layer thickness.•The device with a normalized thickness of 0.012 showed the best humidity response.•Almost doubled frequency shift was obtained after adding ZnO nanorods on the top.

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关键词

A. Thin films,A. Nanostructures,C. X-ray diffraction,C. Electron microscopy,D. Surface properties

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